Bearings for Equipment

JTEKT Group products are used in all kinds of machinery related to semiconductor manufacturing.
We support semiconductor manufacturing with products that combine high precision and corrosion resistance.
PRETREATMENT PROCESS
WAFER MANUFACTURING PROCESS HEAT TREATMENT SYSTEM FILM FORMING PROCESS WAFER CONVEYANCE DEVICE Linear Motion Bearings and Grease for Special Environments
PRETREATMENT PROCESS
①Photoresist Coating
②Cutting the Ingot
③Wafer Polishing
④Flattening(CMP)
⑤Heat Treatment
FILM FORMING PROCESS
⑥Photoresist Coating
⑦Exposure
⑧Developing
⑨Etching
⑩Flattening(CMP)
⑪Ion Implantation
⑫Cleaning
⑬Wafer Conveyance Device
ASSEMBLY AND TESTING PROCESS
⑭Electrode Formation
⑮Inspection
⑯Completion
WAFER MANUFACTURING PROCESS
CMP Equipment
"Corrosion resistant, clean environment friendly bearings"
Different types are used for the rotating part of the polishing tool and the part that comes into contact with the corrosive liquid.
Corrosion Guard Pro Bearing®-SC
For extremely corrosive environments.Made of silicon carbide ceramic that is resistant to corrosion even with strong acids.
LEARN MORE
EXSEV®-EX
Fluorine-based EXSEV®-EX (grease) is included to enhance the lubricity of grease for clean and vacuum applications, making it compatible with clean and vacuum environments.
LEARN MORE
Learm More about Bearings for Semiconductor Production
HEAT TREATMENT SYSTEM
Thermal Processing Film Formation Equipment
Special specification bearings that can be lubricated even under high temperatures
Clean Pro Bearing-RB
"260℃ clean, vacuum compatible,By coating the rolling surface of the bearing with a heat-resistant fluoropolymer coating, it can be used at high temperatures.
LEARN MORE
EXSEV®-PN
"Excellent heat resistance, compatible with 300℃,Adaptable to high-temperature vacuum environments with heat-resistant solid lubricants.
LEARN MORE
EXSEV®-WS
"Achieves both heat resistance of 350℃ and load capacity.Suitable for vacuum environments that require heat resistance and load resistance.
LEARN MORE
EXSEV®-XT
"Long life with grease lubrication even at 350℃,Achieves both high-temperature environments and high lubrication performance of grease-filled bearings.
LEARN MORE
Learm More about Bearings for Semiconductor Production
FILM FORMING PROCESS
Photoresist Coating Equipment
Grease lubricated bearings in clean environments
EXSEV®-EX
Fluorine-based EXSEV®-EX (grease) is included to enhance the lubricity of grease for clean and vacuum applications, making it compatible with clean and vacuum environments.
LEARN MORE
Exposure Equipment
Compatible with clean specifications and bearings made of non-magnetic ceramic material.
New Clean Pro Bearing-PR
Achieves low dust and low outgas by lubrication with fluoropolymer film for clean room and vacuum equipment.
LEARN MORE
Hybrid Ceramic Bearings
The mass of the rolling element is lighter for insulation and high-speed applications, making it suitable for high-speed rotation applications.
Hybrid Ceramic Bearings
LEARN MORE
Non-magnetic Hybrid Ceramic Bearings
LEARN MORE
Etching Equipment
Compatible with bearings made of ceramics or stainless steel with excellent corrosion resistance.
Corrosion Guard Pro Bearing®-MD
Excellent corrosion resistance in environments such as salt water and chemical solutions, and suitable for clean and vacuum environments.
LEARN MORE
Hybrid Ceramic Bearings
Achieves insulation performance. Reduced rolling element mass makes it suitable for high speed rotation applications.
LEARN MORE
Touchdown Bearing for Turbo Molecular Pump
Oil-free to ensure durability during sudden acceleration during emergency stop (touchdown)
Cleaning Equipment
Compatible with bearings made of ceramics or stainless steel with excellent corrosion resistance.
Corrosion Guard Pro Bearing®-MD
Excellent corrosion resistance in environments such as salt water and chemical solutions, and suitable for clean and vacuum environments.
LEARN MORE
Corrosion Guard Pro Bearing®-ZO
Ceramics (zirconia) is used as the bearing material to achieve both corrosion resistance and impact resistance.
LEARN MORE
Ion Injection/ Sputtering Equipment
Clean bearings that generate few impurities in a vacuum.
EXSEV®-EX
Fluorine-based grease EXSEV®-EX is sealed to meet the requirements of clean and vacuum environments.
LEARN MORE
New Clean Pro Bearing-PR
Achieves low dust and low outgas by lubrication with fluoropolymer film for clean room and vacuum equipment.
LEARN MORE
Clean Pro Bearing-RB
260℃ clean, vacuum compatible. By coating the rolling surface of the bearing with a heat-resistant fluoropolymer coating, it can be used at high temperatures.
LEARN MORE
EXSEV®-MO
Basic specifications comaptible with 300℃. Adaptable to high-temperature environments with solid lubrication using molybdenum disulfide.
LEARN MORE
EXSEV®-PN
Excellent heat resistance, compatible with 300℃. Adaptable to high-temperature vacuum environments with heat-resistant solid lubricants.
LEARN MORE
EXSEV®-XT
Long life with grease lubrication even at 350℃. Achieves both high-temperature environments and high lubrication performance of grease-filled bearings.
LEARN MORE
Electrode Formation Equipment
Compatible with high temperature and vacuum environments with ceramic bearings
Full Complement Ceramic Ball Bearings
Compatible with ultra high temperature 800℃. All-ceramic structure for not only high temperature but also corrosion resistance, nonmagnetic, insulation, and vacuum applications.
LEARN MORE
Ceramic Bearings
Ceramics (silicon nitride) is used for the bearing material, and lubrication is provided by fluorine polymer.Mainly used in vacuum and corrosive environments.
LEARN MORE
Inspection Equipment
Non-magnetic bearings are used, which do not affect inspection
Non-magnetic Hybrid Ceramic Bearings
Achieves low dust generation and low outgas while maintaining non-magnetic performance.
LEARN MORE
Ceramic Bearings
Ceramics (silicon nitride) is used for the bearing material, and lubrication is provided by fluorine polymer.Mainly used in vacuum and corrosive environments.
LEARN MORE
Learm More about Bearings for Semiconductor Production
WAFER CONVEYANCE DEVICE
Wafer Conveyance Device
A thin-walled bearing with low dust generation and long life that is compatible with clean environments.
Hybrid Ceramic Bearings
Achieves insulation performance. Reduced rolling element mass makes it suitable for high speed rotation applications.
LEARN MORE
Corrosion Guard Pro Bearing®-MD
Excellent corrosion resistance in environments such as salt water and chemical solutions, and suitable for clean and vacuum environments.
LEARN MORE
K Series Full Complement Combined Ceramic Bearing
Clean specifications for ultra-thin wall bearings. Also suitable for vacuum applications.
LEARN MORE
Bearing Unit for Wafer Transfer Equipment
We support equipment maintenance with compatible bearing units.
EXSEV®-XT
Long life with grease lubrication even at 350℃. Achieves both high-temperature environments and high lubrication performance of grease-filled bearings.
LEARN MORE
Linear Motion Bearings And Grease For Special Environments
EXSEV®-EX (Grease)
Fluorinated grease with low vapor pressure and chemical stability. We offer fluorine grease that is free of perfluorooctanoic acid (PFOA) and has a low environmental impact.
LEARN MORE
Linear Ball Bearing for Special Environments
Compact infinite linear motion bearing. The material composition of EXSEV series supports various special environments.
LEARN MORE
Linear Way for Special Environments
Easily performs high-precision linear motion. The material composition of the EXSEV series supports various special environments.
LEARN MORE
Learm More about Bearings for Semiconductor Production

※ "EXSEV" and "Corrosion Guard Pro Bearing" are registered trademarks of JTEKT.