Bearings for Equipment

JTEKT Group products are used in all kinds of machinery related to semiconductor manufacturing.
We support semiconductor manufacturing with products that combine high precision and corrosion resistance.
PRETREATMENT PROCESS
PRETREATMENT PROCESS
①Photoresist Coating
②Cutting the Ingot
③Wafer Polishing
ASSEMBLY AND TESTING PROCESS
WAFER MANUFACTURING PROCESS
CMP Equipment
"Corrosion resistant, clean environment friendly bearings"
Different types are used for the rotating part of the polishing tool and the part that comes into contact with the corrosive liquid.
Corrosion Guard Pro Bearing®-SC
For extremely corrosive environments.Made of silicon carbide ceramic that is resistant to corrosion even with strong acids.
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EXSEV®-EX
Fluorine-based EXSEV®-EX (grease) is included to enhance the lubricity of grease for clean and vacuum applications, making it compatible with clean and vacuum environments.
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HEAT TREATMENT SYSTEM
Thermal Processing Film Formation Equipment
Special specification bearings that can be lubricated even under high temperatures
Clean Pro Bearing-RB
"260℃ clean, vacuum compatible,By coating the rolling surface of the bearing with a heat-resistant fluoropolymer coating, it can be used at high temperatures.
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EXSEV®-PN
"Excellent heat resistance, compatible with 300℃,Adaptable to high-temperature vacuum environments with heat-resistant solid lubricants.
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EXSEV®-WS
"Achieves both heat resistance of 350℃ and load capacity.Suitable for vacuum environments that require heat resistance and load resistance.
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EXSEV®-XT
"Long life with grease lubrication even at 350℃,Achieves both high-temperature environments and high lubrication performance of grease-filled bearings.
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FILM FORMING PROCESS
Photoresist Coating Equipment
Grease lubricated bearings in clean environments
EXSEV®-EX
Fluorine-based EXSEV®-EX (grease) is included to enhance the lubricity of grease for clean and vacuum applications, making it compatible with clean and vacuum environments.
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Exposure Equipment
Compatible with clean specifications and bearings made of non-magnetic ceramic material.
New Clean Pro Bearing-PR
Achieves low dust and low outgas by lubrication with fluoropolymer film for clean room and vacuum equipment.
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Hybrid Ceramic Bearings
The mass of the rolling element is lighter for insulation and high-speed applications, making it suitable for high-speed rotation applications.
Hybrid Ceramic Bearings
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Non-magnetic Hybrid Ceramic Bearings
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Etching Equipment
Compatible with bearings made of ceramics or stainless steel with excellent corrosion resistance.
Corrosion Guard Pro Bearing®-MD
Excellent corrosion resistance in environments such as salt water and chemical solutions, and suitable for clean and vacuum environments.
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Hybrid Ceramic Bearings
Achieves insulation performance. Reduced rolling element mass makes it suitable for high speed rotation applications.
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Touchdown Bearing for Turbo Molecular Pump
Oil-free to ensure durability during sudden acceleration during emergency stop (touchdown)
Cleaning Equipment
Compatible with bearings made of ceramics or stainless steel with excellent corrosion resistance.
Corrosion Guard Pro Bearing®-MD
Excellent corrosion resistance in environments such as salt water and chemical solutions, and suitable for clean and vacuum environments.
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Corrosion Guard Pro Bearing®-ZO
Ceramics (zirconia) is used as the bearing material to achieve both corrosion resistance and impact resistance.
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Ion Injection/ Sputtering Equipment
Clean bearings that generate few impurities in a vacuum.
EXSEV®-EX
Fluorine-based grease EXSEV®-EX is sealed to meet the requirements of clean and vacuum environments.
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New Clean Pro Bearing-PR
Achieves low dust and low outgas by lubrication with fluoropolymer film for clean room and vacuum equipment.
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Clean Pro Bearing-RB
260℃ clean, vacuum compatible. By coating the rolling surface of the bearing with a heat-resistant fluoropolymer coating, it can be used at high temperatures.
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EXSEV®-MO
Basic specifications comaptible with 300℃. Adaptable to high-temperature environments with solid lubrication using molybdenum disulfide.
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EXSEV®-PN
Excellent heat resistance, compatible with 300℃. Adaptable to high-temperature vacuum environments with heat-resistant solid lubricants.
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EXSEV®-XT
Long life with grease lubrication even at 350℃. Achieves both high-temperature environments and high lubrication performance of grease-filled bearings.
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Electrode Formation Equipment
Compatible with high temperature and vacuum environments with ceramic bearings
Full Complement Ceramic Ball Bearings
Compatible with ultra high temperature 800℃. All-ceramic structure for not only high temperature but also corrosion resistance, nonmagnetic, insulation, and vacuum applications.
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Ceramic Bearings
Ceramics (silicon nitride) is used for the bearing material, and lubrication is provided by fluorine polymer.Mainly used in vacuum and corrosive environments.
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Inspection Equipment
Non-magnetic bearings are used, which do not affect inspection
Non-magnetic Hybrid Ceramic Bearings
Achieves low dust generation and low outgas while maintaining non-magnetic performance.
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Ceramic Bearings
Ceramics (silicon nitride) is used for the bearing material, and lubrication is provided by fluorine polymer.Mainly used in vacuum and corrosive environments.
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WAFER CONVEYANCE DEVICE
Wafer Conveyance Device
A thin-walled bearing with low dust generation and long life that is compatible with clean environments.
Hybrid Ceramic Bearings
Achieves insulation performance. Reduced rolling element mass makes it suitable for high speed rotation applications.
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Corrosion Guard Pro Bearing®-MD
Excellent corrosion resistance in environments such as salt water and chemical solutions, and suitable for clean and vacuum environments.
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K Series Full Complement Combined Ceramic Bearing
Clean specifications for ultra-thin wall bearings. Also suitable for vacuum applications.
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Bearing Unit for Wafer Transfer Equipment
We support equipment maintenance with compatible bearing units.
EXSEV®-XT
Long life with grease lubrication even at 350℃. Achieves both high-temperature environments and high lubrication performance of grease-filled bearings.
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Linear Motion Bearings And Grease For Special Environments
EXSEV®-EX (Grease)
Fluorinated grease with low vapor pressure and chemical stability. We offer fluorine grease that is free of perfluorooctanoic acid (PFOA) and has a low environmental impact.
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Linear Ball Bearing for Special Environments
Compact infinite linear motion bearing. The material composition of EXSEV series supports various special environments.
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Linear Way for Special Environments
Easily performs high-precision linear motion. The material composition of the EXSEV series supports various special environments.
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※ "EXSEV" and "Corrosion Guard Pro Bearing" are registered trademarks of JTEKT.